AwardTape · Defense awards · Onto Innovation
Onto Innovation: $4.6M in DoD and DHS awards since FY2024
Onto Innovation holds 14 DoD and DHS prime awards across 3 registrations, with $4.6M obligated Feb 8, 2024 to Mar 12, 2026 (USAspending).
Registrations included: Nanometrics Inc (11 awards on 2 registrations); 4 D Technology Corporation (3 awards).
| Obligated FY2024+, all registrations | $4.6M |
|---|---|
| Awards, all registrations | 14 |
| Registrations | 3 |
| FY2024 | $1.5M |
| FY2025 | $2.1M |
| FY2026 to date | $1.0M |
| This registration | Nanometrics Inc: $4.0M on 10 awards · its award list |
USAspending reports a parent company for each registration. These registrations report Onto Innovation Inc as their parent, directly or through a subsidiary, with their own award counts and obligations since Oct 1, 2023. Joint ventures with other companies are not included.
| Registration | Awards | Obligated FY2024+ |
|---|---|---|
| Nanometrics Inc | 10 | $4.0M |
| 4 D Technology Corporation | 3 | $436K |
| Nanometrics Inc | 1 | $153K |
| # | Category | Obligated FY2024+ | Awards | Share |
|---|---|---|---|---|
| 1 | Instruments and lab equipment | $4.0M | 9 awards | 100% |
| 2 | Professional services, other | $0 | 1 awards | 0.0% |
| # | Agency | Obligated FY2024+ | Awards | Share |
|---|---|---|---|---|
| 1 | Department of the Air Force | $4.0M | 10 awards | 100% |
| Award | Obligated FY2024+ | What | Agency | Category | Latest action |
|---|---|---|---|---|---|
| FA702224F0041 delivery order | $1.3M | Replacement of geophysical equipment | Air Force | Instruments and lab equipment | Feb 8, 2024 DoD 90d |
| FA702226F0032 delivery order | $673K | Geophysical field systems technology refresh | Air Force | Instruments and lab equipment | Jan 12, 2026 DoD 90d |
| FA702225F0047 delivery order | $589K | Geophysical field system replacement system | Air Force | Instruments and lab equipment | Mar 6, 2025 DoD 90d |
| FA702225F0064 delivery order | $389K | Geophysical field systems technology refresh | Air Force | Instruments and lab equipment | Jul 9, 2025 DoD 90d |
| FA702225F0044 delivery order | $387K | Replacement of obsolete gfs seismometers and data acquisition system currently operating at multiple locations | Air Force | Instruments and lab equipment | Feb 24, 2025 DoD 90d |
| FA702226F0031 delivery order | $364K | Geophysical field systems technology refresh | Air Force | Instruments and lab equipment | Jan 9, 2026 DoD 90d |
| FA702225F0065 delivery order | $248K | Geophysical field systems technology refresh | Air Force | Instruments and lab equipment | Jul 8, 2025 DoD 90d |
| FA702225F0066 delivery order | $50K | Geophysical field systems technology refresh | Air Force | Instruments and lab equipment | Jun 18, 2025 DoD 90d |
| FA702221D0003 IDIQ contract | $0 | Replacement of obsolete gfs seismometers and data acquisition system currently operating at multiple locations. | Air Force | Professional services, other | Jul 8, 2025 DoD 90d |
| FA702226F0049 delivery order | $0 | Geophysical field system replacement program | Air Force | Instruments and lab equipment | Mar 12, 2026 DoD 90d |
Source: USAspending.gov prime award data (FPDS), DoD and DHS contracts, orders and IDVs with any action since Oct 1, 2023. Obligated FY2024+ sums the obligations on those actions; total obligated is the award's lifetime figure. DoD contract actions publish on USAspending about 90 days after signing (DFARS PGI 204.6), so the latest DoD actions here trail the calendar by about 3 months. Data as of Oct 9, 2026.
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